现代制造工程 ›› 2024, Vol. 531 ›› Issue (12): 145-156.doi: 10.16731/j.cnki.1671-3133.2024.12.019
• 综述 • 上一篇
微细刀具研究现状分析与探讨*
李伟1, 权毅1, 龙昌金1, 郭旭东1,2, 任莹晖1, 黄向明1
- 1 湖南大学机械与运载工程学院,长沙 410082;
2 江苏自动化研究所,连云港 222016
-
收稿日期:2024-03-18出版日期:2024-12-18发布日期:2024-12-24 -
通讯作者:李伟,博士,教授,主要从事半导体晶圆与强光元器件超精密加工技术、智能制造控制系统与高端机床装备及应急救援工程装备研究工作。E-mail:liwei@hnu.edu.cn -
基金资助:*国家自然科学基金面上项目(52275421,52075161);广东省自然科学基金面上项目(2023A1515011193)
Research status analysis and review of micro cutting tools
LI Wei1, QUAN Yi1, LONG Changjin1, GUO Xüdong1,2, REN Yinghui1, HUANG Xiangming1
- 1 College of Mechanical and Vehicle Engineering,Hunan University,Changsha 410082,China;
2 Jiangsu Automation Research Institute,Lianyungang 222016,China
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Received:2024-03-18Online:2024-12-18Published:2024-12-24
摘要： 诸多行业对于微小零件、产品的迫切需求推动了微制造技术的高速发展。微细切削技术作为最具潜力的微制造技术之一,可在金属、陶瓷、聚合物和复合材料等中高效、准确地生成复杂特征,被广泛地运用于医疗、通信与航空航天等领域。微细刀具作为影响微细切削技术加工质量的关键因素,受到了业界与研究学者们的广泛关注。回顾并讨论了微细刀具相关的最新成果和发展,重点讨论分析了微细铣刀、微细车刀、微细钻头和微细磨头4种典型微细刀具的研制现状与使用性能,并对其失效分析与监测以及刀具涂层进行了详细介绍。最后,强调了微细刀具未来可能的发展趋势和研究方向,以期为微细刀具的研究学者提供重要的参考。
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引用本文
李伟, 权毅, 龙昌金, 郭旭东, 任莹晖, 黄向明. 微细刀具研究现状分析与探讨*[J]. 现代制造工程, 2024, 531(12): 145-156.
LI Wei, QUAN Yi, LONG Changjin, GUO Xüdong, REN Yinghui, HUANG Xiangming. Research status analysis and review of micro cutting tools[J]. Modern Manufacturing Engineering, 2024, 531(12): 145-156.
| [1] CHAE J,PARK S S,FREIHEIT T.Investigation of micro-cutting operations[J].Int J Mach Tools Manuf,2006,46(3/4):313-332. [2] MALEKIAN M,PARK S S,JUN M B G.Tool wear monitoring of micro-milling operations[J].Journal of Materials Processing Technology,2009,209(10):4903-4914. [3] GUO P,LU Y,EHMANN K F,et al.Generation of hierarchical micro-structures for anisotropic wetting by elliptical vibration cutting[J].CIRP Annals,2014,63(1):553-556. [4] BRUZZONE A A G,COSTA H L,LONARDO P M,et al.Advances in engineered surfaces for functional performance[J].CIRP Annals-Manufacturing Technology,2008,57(2):750-769. [5] HE Y,ZHOU T,DONG X,et al.Generation of high-saturation two-level iridescent structures by vibration-assisted fly cutting[J].Materials & Design,2020,193:108839. [6] 梁迎春,赵岩,王波,等.面向微小零件加工的微细切削技术[J].吉林大学学报(工学版),2008(5):1069-1076. [7] WANG K,ZHANG Q,ZHANG J.Evaluation of scale effect of micro electrical discharge machining system[J].Journal of Manufacturing Processes,2019,38:174-178. [8] WENG F,LIU Y,CHEW Y,et al.IN100 Ni-based superalloy fabricated by micro-laser aided additive manufacturing:correlation of the microstructure and fracture mechanism[J].Materials Science and Engineering:A,2020,788:139467. [9] SILVESTRE C M,NGUYEN V,JANSEN H,et al.Deep reactive ion etching of 'grass-free' widely-spaced periodic 2D arrays,using sacrificial structures[J].Microelectronic Engineering,2020,223:111228. [10] HAMDANA G,PURANTO P,LANGFAHL-KLABES J,et al.Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching[J].Sensors and Actuators A:Physical,2018,283:65-78. [11] SAHOO P,PATRA K,SZALAY T,et al.Determination of minimum uncut chip thickness and size effects in micro-milling of P-20 die steel using surface quality and process signal parameters[J].The International Journal of Advanced Manufacturing Technology,2020,106:4675-4691. [12] MA Y,LIU W,LIU C.Research on the process of fabricating a multi-layer metal micro-structure based on UV-LIGA overlay technology[J].Nanotechnology and Precision Engineering (NPE),2019,2(2):83-88. [13] AURICH J C,BOHLEY M,REICHENBACH I G,et al.Surface quality in micro milling:influences of spindle and cutting parameters[J].CIRP Annals,2017,66(1):101-104. [14] ARAMCHAROEN A,MATIVENGA P T.Size effect and tool geometry in micromilling of tool steel[J].Precision Engineering,2009,33(4):402-407. [15] PANG K,SONG L,FANG F,et al.An imaging system with a large depth of field based on an overlapped micro-lens array[J].CIRP Annals,2016,65(1):471-474. [16] LI H,YU T,ZHU L,et al.Modeling and simulation of grinding wheel by discrete element method and experimental validation[J].The International Journal of Advanced Manufacturing Technology,2015,81(9):1921-1938. [17] GAO P,LIANG Z,WANG X,et al.Cutting edge damage in grinding of cemented carbides micro end mills[J].Ceramics International,2017,43(14):11331-11338. [18] 李伟,周志雄,尹韶辉,等.微细磨削技术及微磨床设备研究现状分析与探讨[J].机械工程学报,2016,52(17):10-19. [19] SHAW M C.The size effect in metal cutting[J].Sadhana-Acad Proc Eng Sci,2003,28:875-896. [20] BOSWELL B,ISLAM M N,DAVIES I J.A review of micro-mechanical cutting[J].The International Journal of Advanced Manufacturing Technology,2018,94(1):789-806. [21] CHEN N,ZHANG X,WU J,et al.Suppressing the burr of high aspect ratio structure by optimizing the cutting parameters in the micro-milling process[J].The International Journal of Advanced Manufacturing Technology,2020,111:985-997. [22] HUO D,CHENG K,WARDLE F.Design of a five-axis ultra-precision micro-milling machine—UltraMill.Part 1:holistic design approach,design considerations and specifications[J].The International Journal of Advanced Manufacturing Technology,2010,47:867-877. [23] BISSACCO G,HANSEN H N,DE CHIFFRE L.Micromilling of hardened tool steel for mould making applications[J].Journal of Materials Processing Technology,2005,167(2):201-207. [24] CHEN N,LI H N,WU J,et al.Advances in micro milling:from tool fabrication to process outcomes[J].Int J Mach Tools Manuf,2021,160:103670. [25] CAI Z S,JIANG Z,WANG C X.Force controlling method for measuring fracture strength and toughness of diamond film[J].JOURNAL-ZHEJIANG UNIVERSITY OF TECHNOLOGY,2000,28(3):216-219. [26] LIANG Z,LI S,ZHOU T,et al.Design and fabrication of a new micro ball-end mill with conical flank face[J].The International Journal of Advanced Manufacturing Technology,2018,97(1):39-50. [27] DENKENA B,KÖHLER J,VENTURA C E H.Grinding of PCBN cutting inserts[J].International Journal of Refractory Metals and Hard Materials,2014,42:91-96. [28] NGUYEN D,TOOPTONG S,PARK K H,et al.Formation mechanism of alumina layer in protecting cubic boron nitride inserts in turning cast irons[J].International Journal of Machine Tools and Manufacture,2020,153:103539. [29] TOMURA S,KUNIEDA M.Analysis of electromagnetic force in rough cutting of wire-EDM[J].Int J Electr Mach,2009,14:17-22. [30] OHMORI H,KATAHIRA K,UEHARA Y,et al.Improvement of Mechanical Strength of Micro Tools by Controlling Surface Characteristics[J].CIRP Annals,2003,52(1):467-470. [31] HAJRI M,PFAFF J,BÜTTNER H,et al.Fabrication of a ball end nose micro milling tool by tangential laser ablation[J].Procedia CIRP,2018,77:654-657. [32] OGAWA Y,OTA M,NAKAMOTO K,et al.A study on machining of binder-less polycrystalline diamond by femtosecond pulsed laser for fabrication of micro milling tools[J].CIRP Annals,2016,65(1):245-248. [33] CHEN N,LI Z,WU Y,et al.Investigating the ablation depth and surface roughness of laser-induced nano-ablation of CVD diamond material[J].Precision Engineering,2019,57:220-228. [34] ADAMS D P,VASILE M J,BENAVIDES G,et al.Micromilling of metal alloys with focused ion beam-fabricated tools[J].Precision Engineering,2001,25(2):107-113. [35] 赵孟.微细铣削尺寸效应基础研究[D].南京:南京航空航天大学,2014. [36] NISHIKAWA F,YOSHIMOTO S,SOMAYA K.Ultrahigh-speed micro-milling end mill with shank directly supported by aerostatic bearings[J].Journal of Advanced Mechanical Design,Systems,and Manufacturing,2012,6(6):979-988. [37] MASUZAWA T.State of the art of micromachining[J].CIRP Annals,2000,49(2):473-488. [38] UHLMANN E,OBERSCHMIDT D,KUCHE Y,et al.Cutting edge preparation of micro milling tools[J].Procedia CIRP,2014,14:349-354. [39] ZHANG X,LIU Q,ZHOU X,et al.Determining issues in optimal turning of micro-structured functional surfaces[J].The International Journal of Advanced Manufacturing Technology,2015,81(1):387-396. [40] EVANS C J,BRYAN J B. ″Structured″,″Textured″ or ″Engineered″ Surfaces[J].CIRP Annals,1999,48(2):541-556. [41] EGASHIRA K,IWATA M,NOMURA Y.Boring and face grooving using micro turning tools[J].CIRP Annals,2011,60(1):81-84. [42] FURUKAWA T,NOMURA Y,HARADA K,et al.Fabrication of Micropins Using Micro Turning Tools[C]//Proceedings of the 14th International Conference on Precision Engineering (ICPE 2012).Hyogo:PISCATAWAY,2012. [43] PICARD Y N,ADAMS D P,VASILE M J,et al.Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components[J].Precision Engineering,2003,27(1):59-69. [44] WANG X,POPOV V L,YU Z J,et al.Preparation of Micro-Pit-Textured PCD Tools and Micro-Turning Experiment on SiCp/Al Composites[J].Micromachines,2022,13(7):14. [45] ELIAS J V,VENKATESH N P,LAWRENCE K D,et al.Tool texturing for micro-turning applications—an approach using mechanical micro indentation[J].Mater Manuf Process,2021,36(1):84-93. [46] ADAIR K,KAPOOR S G,DEVOR R E.Development of a unique topology for a hard-turning micro-scale machine tool[J].Journal of Manufacturing Processes,2011,13(2):75-84. [47] SIVARAMAN V,SANKARAN S,VIJAYARAGHAVAN L.Machinability of multiphase microalloyed steel[J].Procedia CIRP,2012,2:55-59. [48] LAURO C H,RIBEIRO F S L,BRANDÃO L C,et al.Analysis of behaviour biocompatible titanium alloy (Ti-6Al-7Nb) in the micro-cutting[J].Measurement,2016,93:529-540. [49] ASLANTAS K,DANISH M,HASCELIK A,et al.Investigations on Surface Roughness and Tool Wear Characteristics in Micro-Turning of Ti-6Al-4V Alloy[J].Materials,2020,13(13):20. [50] DAS A,BAJPAI V.Machinability analysis of lead free brass in high speed micro turning using minimum quantity lubrication[J].CIRP J Manuf Sci Technol,2023,41:180-195. [51] RAHAMATHULLAH I,SHUNMUGAM M.Analyses of forces and hole quality in micro-drilling of carbon fabric laminate composites[J].Journal of Composite Materials,2013,47(9):1129-1140. [52] GONG Y,EHMANN K F,LIN C.Analysis of dynamic characteristics of micro-drills[J].Journal of Materials Processing Technology,2003,141(1):16-28. [53] HSIEH J F.Mathematical model for helical drill point[J].International Journal of Machine Tools and Manufacture,2005,45(7/8):967-977. [54] HUANG C,TARNG Y,CHIU C,et al.Investigation of machine vision assisted automatic resharpening process of micro-drills[J].Journal of Materials Processing Technology,2009,209(18/19):5944-5954. [55] ZHENG L,WANG C,YANG L,et al.Characteristics of chip formation in the micro-drilling of multi-material sheets[J].International Journal of Machine Tools and Manu-facture,2012,52(1):40-49. [56] DE SOUSA P F,BORGES V L,PEREIRA I C,et al.Estimation of heat flux and temperature field during drilling process using dynamic observers based on Green's function[J].Applied Thermal Engineering,2012,48:144-154. [57] AZIZ M,OHNISHI O,ONIKURA H.Novel micro deep drilling using micro long flat drill with ultrasonic vibration[J].Precision Engineering,2012,36(1):168-174. [58] ONIKURA H,OHNISHI O,TAKE Y,et al.Fabrication of Micro Carbide Tools by Ultrasonic Vibration Grinding[J].CIRP Annals,2000,49(1):257-260. [59] EGASHIRA K,MIZUTANI K.Micro-drilling of monocrystalline silicon using a cutting tool[J].Precision Engineering,2002,26(3):263-268. [60] EGASHIRA K,HOSONO S,TAKEMOTO S,et al.Fabrication and cutting performance of cemented tungsten carbide micro-cutting tools[J].Precision Engineering,2011,35(4):547-553. [61] AHN S H,RYU S H,CHOI D K,et al.Electro-chemical micro drilling using ultra short pulses[J].Precision Engineering,2004,28(2):129-134. [62] MITHU M,FANTONI G,CIAMPI J.The effect of high frequency and duty cycle in electrochemical microdrilling[J].The International Journal of Advanced Manufacturing Technology,2011,55:921-933. [63] HO S,NGOI B.Sub-microdrilling with ultrafast pulse laser interference[J].Applied Physics B,2004,79:99-102. [64] SMITH G T.Cutting tool technology:industrial handbook[M].London:Springer,2008. [65] PRATAP A,PATRA K,DYAKONOV A A.A comprehensive review of micro-grinding:emphasis on toolings,performance analysis,modeling techniques,and future research directions[J].International Journal of Advanced Manufacturing Technology,2019,104(1/2/3/4):63-102. [66] BUTLER-SMITH P,AXINTE D,DAINE M.Solid diamond micro-grinding tools:from innovative design and fabrication to preliminary performance evaluation in Ti-6Al-4V[J].International Journal of Machine Tools and Manufacture,2012,59:55-64. [67] CHENG J,WU J.Experimental study on the fabrication method of diamond ultra-small micro-grinding tool[J].The International Journal of Advanced Manufacturing Technolo-gy,2018,97:1431-1444. [68] AURICH J C,ENGMANN J,SCHUELER G M,et al.Micro grinding tool for manufacture of complex structures in brittle materials[J].CIRP Annals,2009,58(1):311-314. [69] AURICH J C,CARRELLA M,WALK M.Micro grinding with ultra small micro pencil grinding tools using an integrated machine tool[J].CIRP Annals,2015,64(1):325-328. [70] AZIZ M,OHNISHI O,ONIKURA H.Advanced burr-free hole machining using newly developed micro compound tool[J].International Journal of Precision Engineering and Manufacturing,2012,13:947-953. [71] PARK H K,ONIKURA H,OHNISHI O,et al.Development of micro-diamond tools through electroless composite plating and investigation into micro-machining characteristics[J].Precision Engineering,2010,34(3):376-386. [72] GONG Y,WEN X,CHENG J,et al.Experimental study on fabrication and evaluation of a micro-scale shaft grinding tool[J].Journal of Mechanical Science and Technology,2014,28:1027-1037. [73] ASAD A B M A,MASAKI T,RAHMAN M,et al.Tool-based micro-machining[J].Journal of Materials Processing Technology,2007,192-193:204-211. [74] LI W,XIE S,DENG Z,et al.Novel designed mechanical-mechanochemical synergistic micro-grinding technology and compounded abrasive micro-grinding tools[J].Journal of Materials Research and Technology,2023,25:3365-3381. [75] PRATAP A,PATRA K,DYAKONOV A A.Experimental analysis of ductile-brittle transitions for parallel and intersecting micro-slot grinding in BK-7 glass[J].Ceramics International,2019,45(8):11013-11026. [76] VOGLER M P,LIU X,KAPOOR S G,et al.Development of meso-scale Machine Tool (mMT) systems[J].TECHNICAL PAPERS-SOCIETY OF MANUFACTURING ENGINEERS,2002,30:1-8. [77] XIAO H.WEAR BEHAVIOR AND WEAR MECHANISM OF CERAMIC TOOLS IN MACHINING HARDENED ALLOY-STEEL[J].Wear,1990,139(2):439-451. [78] MITTAL R K,SINGH R K,KULKARNI S S,et al.Characterization of anti-abrasion and anti-friction coatings on micromachining response in high speed micromilling of Ti-6Al-4V[J].Journal of Manufacturing Processes,2018,34:303-312. [79] BALÁZS B Z,GEIER N,TAKÁCS M,et al.A review on micro-milling:recent advances and future trends[J].The International Journal of Advanced Manufacturing Technology,2021,112(3):655-684. [80] KÖNIG W,KUTZNER K,SCHEHL U.Tool monitoring of small drills with acoustic emission[J].International Journal of Machine Tools and Manufacture,1992,32(4):487-493. [81] TANSEL I,RODRIGUEZ O,TRUJILLO M,et al.Micro-end-milling—I.Wear and breakage[J].International Journal of Machine Tools and Manufacture,1998,38(12):1419-1436. [82] GAO Q,GUO G Y,CAI M.Wear mechanism and experimental study of a tool used for micro-milling single-crystal nickel-based superalloys[J].International Journal of Advanced Manufacturing Technology,2021,113(1/2):117-129. [83] BHAT N N,DUTTA S,VASHISTH T,et al.Tool condition monitoring by SVM classification of machined surface images in turning[J].The International Journal of Advanced Manufacturing Technology,2016,83:1487-1502. [84] TANSEL I N,ARKAN T T,BAO W Y,et al.Tool wear estimation in micro-machining.Part I:tool usage-cutting force relationship[J].Int J Mach Tools Manuf,2000,40(4):599-608. [85] SINGH K K,SINGH R,KARTIK V.Comparative Study of Chatter Detection Methods for High-Speed Micromilling of Ti6Al4V[J].Procedia Manufacturing,2015,1:593-606. [86] YUAN Y,JING X,LI H,et al.Chatter detection based on wavelet coherence functions in micro-end-milling processes[J].Proceedings of the Institution of Mechanical Engineers,Part B:Journal of Engineering Manufacture,2018,233(9):1934-1945. [87] CHEN T H,LU M C,CHIOU S J,et al.Study of Sound Signal for Tool Wear Monitoring System in Micro-milling Processes[C]//Proceedings of the ASME International Manufacturing Science and Engineering Conference.New York:AMER Soc Mechanical Engineers,2009. [88] LEE M H,LU M C,TSAI J C,et al.Development of Sound Based Tool Wear Monitoring System in Micro-milling[C]//Proceedings of the ASME International Manufacturing Science and Engineering Conference.New York:AMER Soc Mechanical Engineers,2011. [89] GOMES M C,BRITO L C,BACCI D S M,et al.Tool wear monitoring in micromilling using support vector machine with vibration and sound sensors[J].Precision Engineering,2021,67:137-151. [90] WANG S M,LIN J J.On-machine Volumetric-error Measurement and Compensation Methods for Micro Machine Tools[J].International Journal of Precision Engineering and Manufacturing,2013,14(6):989-994. [91] FERNANDEZ-ROBLES L,SANCHEZ-GONZALEZ L,DIEZ-GONZALEZ J,et al.Use of image processing to monitor tool wear in micro milling[J].Neurocomputing,2021,452:333-340. [92] ARAMCHAROEN A,MATIVENGA P T,YANG S,et al.Evaluation and selection of hard coatings for micro milling of hardened tool steel[J].International Journal of Machine Tools and Manufacture,2008,48(14):1578-1584. [93] SHAKOORI N,FU G Y,LE B,et al.An experimental investigation on tool wear behaviour of uncoated and coated micro-tools in micro-milling of graphene-reinforced polymer nanocomposites[J].International Journal of Advanced Manufacturing Technology,2021,113(7/8):2003-2015. [94] SWAIN N,VENKATESH V,KUMAR P,et al.An experimental investigation on the machining characteristics of Nimonic 75 using uncoated and TiAlN coated tungsten carbide micro-end mills[J].CIRP J Manuf Sci Technol,2017,16:34-42. [95] WU X,LI L,HE N,et al.Influence of the cutting edge radius and the material grain size on the cutting force in micro cutting[J].Precision Engineering,2016,45:359-364. [96] TORRES C D,HEANEY P J,SUMANT A V,et al.Analyzing the performance of diamond-coated micro end mills[J].International Journal of Machine Tools and Manufacture,2009,49(7):599-612. [97] ASLANTAS K,HOPA H E,PERCIN M,et al.Cutting performance of Nano-Crystalline Diamond (NCD) coating in micro-milling of Ti6Al4V alloy[J].Precision Engineering,2016,45:55-66. [98] TAKÁCS M,VERÖ B,MÉSZÁROS I.Micromilling of metallic materials[J].Journal of Materials Processing Technology,2003,138(1):152-155. [99] LIANG Z,GAO P,WANG X,et al.Cutting performance of different coated micro end mills in machining of Ti-6Al-4V[J].Micromachines,2018,9(11):568. [100] BIERMANN D,STEINER M,KREBS E.Investigation of Different Hard Coatings for Micromilling of Austenitic Stainless Steel[J].Procedia CIRP,2013,7:246-251. [101] JACKSON M J,MORRELL J S.Machining with nanomaterials[M].New York:Springer,2009. [102] HEI H,MA J,LI X,et al.Preparation and performance of chemical vapor deposition diamond coatings synthesized onto the cemented carbide micro-end mills with a SiC interlayer[J].Surface and Coatings Technology,2015,261:272-277. [103] OKAZAKI Y,MISHIMA N,ASHIDA K.Microfactory - concept,history,and developments[J].Journal of Manufacturing Science and Engineering-Transactions of the ASME,2004,126(4):837-844. [104] LIU X,DEVOR R E,KAPOOR S G,et al.The mechanics of machining at the microscale:assessment of the current state of the science[J].Journal of Manufacturing Science and Engineering-Transactions of the ASME,2004,126(4):666-678. [105] SURESH N,GANESH S,JAGADESH T.Investigations into edge radius and point angle on energy consumption during micro drilling of titanium alloy[J].Materials Today:Proceedings,2020,26:586-591. |
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