关键词: 气浮工作台, 毛细管节流, 静特性, Fluent数值仿真

Abstract: On the basis of analyzing 2×2 symmetrical capillary throttle air bearing table model,the Fluent software was used to obtain the pressure and velocity distribution of the gas membrane flow field,mass flow rate and bearing capacity were also obtained,and analyzed the effects of capillary throttle spacing,the structural parameters of capillary throttle and gas supply pressure on the static characteristics of air bearing table.The results show that:the influence of the spacing of restrictors on the mass flow rate is not significant,bearing capacity increases with the increase of the restrictors’ spacing;the changing of restrictors’ angle has little effect on mass flow rate,bearing capacity and static stiffness;mass flow rate and bearing capacity increase with the increase of gas supply pressure.The results provide a simulation data reference for the design of air bearing table and the actual engineering needs.

Key words: air bearing table, capillary throttle, static characteristics, Fluent numerical simulation