具有混合晶圆流的单臂组合设备建模及调度

doi:10.16731/j.cnki.1671-3133.2017.01.006

现代制造工程 ›› 2017, Vol. 436 ›› Issue (1): 29-34.doi: 10.16731/j.cnki.1671-3133.2017.01.006

具有混合晶圆流的单臂组合设备建模及调度

潘春荣, 王际鹏, 黎良

江西理工大学机电工程学院,赣州 341000

收稿日期:2015-06-18 出版日期:2017-01-20 发布日期:2018-01-10
作者简介:潘春荣,博士,副教授,已发表论文五十余篇,研究方向为机电一体化系统、制造过程的优化和控制、工业系统仿真。王际鹏,硕士研究生,研究方向为制造过程的优化和控制、工业系统仿真。E-mail: Chunrongpan@163.com
基金资助:
国家自然科学基金资助项目(71361014);江西省教育厅项目(GJJ150673)

Modeling and scheduling of single-armed cluster tools with mixed wafer flows

Pan Chunrong, Wang Jipeng, Li Liang

School of Mechanical and Electrical Engineering,Jiangxi University of Science and Technology,Ganzhou 341000,Jiangxi,China

Received:2015-06-18 Online:2017-01-20 Published:2018-01-10

摘要/Abstract

摘要： 为有效提高组合设备利用水平与工作效率,研究在单臂组合设备上实现不同种类晶圆混合加工的问题。建立独立于具体晶圆流的单臂组合设备Petri网模型,该模型能准确描述不同晶圆流模式下系统的运行过程。基于拉式调度策略和周期调度的思想,推导出单臂组合设备在混合晶圆流下能形成稳定周期性加工的条件。然后依据约束条件建立系统的线性规划模型,获得稳态的周期调度。运用虚拟晶圆方法实现所得调度,并给出调度的甘特图。最后,以晶圆制造的数据作为算例验证了模型和调度的有效性。

关键词: 组合设备, Petri网, 建模, 调度, 晶圆制造

Abstract: For improving the efficiency of cluster tools availably,the issues for processing different types of wafers concurrently in single-armed cluster tools are studied.A Petri net model describing the process of the single-armed cluster tools precisely,which is independent of diverse wafer flow pattern,is developed.Some equations,which define that the single-armed cluster tools is capable of performing a steady and cyclic operation under mixed wafer flows,are derived based on backward and cyclic scheduling strategy.Furthermore,the linear programming model is established and a periodic steady-state schedule is obtained as well.The presented scheduling is executed by the means of virtual wafer and the Gantt chart of scheduling is provided.Finally,the validity and efficiency of the proposed model and scheduling is verified.

Key words: cluster tools, Petri net, modeling, scheduling, wafer fabrication

中图分类号:

TN305

潘春荣, 王际鹏, 黎良. 具有混合晶圆流的单臂组合设备建模及调度[J]. 现代制造工程, 2017, 436(1): 29-34.

Pan Chunrong, Wang Jipeng, Li Liang. Modeling and scheduling of single-armed cluster tools with mixed wafer flows[J]. Modern Manufacturing Engineering, 2017, 436(1): 29-34.

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具有混合晶圆流的单臂组合设备建模及调度

Modeling and scheduling of single-armed cluster tools with mixed wafer flows

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